Design of a remote plasma-enhanced chemical vapor deposition system for growth of tin containing group-IV alloys: Journal of Vacuum Science & Technology B: Vol 38, No 6
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What is plasma-enhanced chemical vapor deposition (PECVD)/plasma-assisted chemical vapor deposition (PACVD)?
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Low‐Temperature Synthesis of Large‐Scale Molybdenum Disulfide Thin Films Directly on a Plastic Substrate Using Plasma‐Enhanced Chemical Vapor Deposition - Ahn - 2015 - Advanced Materials - Wiley Online Library
Schematic diagram of plasma enhanced chemical vapor deposition system.... | Download Scientific Diagram
Plasma-Enhanced Chemical Vapor Deposition: Where we are and the Outlook for the Future | IntechOpen
Low-energy plasma-enhanced chemical vapor deposition - Wikipedia
Plasma-enhanced chemical vapor deposition synthesis of vertically oriented graphene nanosheets - Nanoscale (RSC Publishing)
Figure 1 from Plasma-Enhanced Chemical Vapor Deposition of SiO 2 Thin Films at Atmospheric Pressure by Using HMDS / Ar / O 2 | Semantic Scholar
Plasma-enhanced chemical vapor deposition of amorphous carbon molecular sieve membranes for gas separation - RSC Advances (RSC Publishing)
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