New ELPHY functionalities - Raith - Nanofabrication systems for EBL and FIB
High-Resolution Lithography | Nanolithography | Supplier
New ELPHY functionalities - Raith - Nanofabrication systems for EBL and FIB
Dual beam lithography (FIB + EBL) for nanometric structures | IEEE Conference Publication | IEEE Xplore
Helium and Neon Ion Beam Lithography with ORION NanoFab
Software Manual for Elphy Plus System Version 3.00
Hardware Operation Manual ELPHYQuantum and ELPHY Plus
Combinatorial Optimization of a Molecular Glass Photoresist System for Electron Beam Lithography - Bauer - 2011 - Advanced Materials - Wiley Online Library
Alkemade Layout V1
Nanopatterning | Multi-Field Patterning Sequences | Supplier
Nanopatterning | Multi-Field Patterning Sequences | Supplier
Performance of a high resolution chemically amplified electron beam resist at various beam energies - ScienceDirect
Nanopatterning | Multi-Field Patterning Sequences | Supplier
Nanowire Formation Using Electron Beam Lithography
New ELPHY functionalities - Raith - Nanofabrication systems for EBL and FIB
Single-digit nanometer nanoimprint templates
Software Manual for Elphy Plus System Version 3.00
PI-2005 CompactPCI Pattern Generator
Hardware Operation Manual ELPHYQuantum and ELPHY Plus
