Figure 1 from A Tunable RF MEMS Inductor on Silicon Incorporating an Amorphous Silicon Bimorph in a Low-Temperature Process | Semantic Scholar
Tunable MEMS inductor for power and communication systems | TechLink
RF MEMS Inductors and Their Applications—A Review | Semantic Scholar
3D MEMS In-Chip Solenoid Inductor With High Inductance Density for Power MEMS Device
RF MEMS Inductors and Their Applications—A Review
PDF) MEMS inductor fabrication and emerging applications in power electronics and neurotechnologies | ResearchGate
MEMS@UC - MicroSystems & MicroSensors - Research - Microfabricated Toroidal Type Planar Inductor for MEMS and Power Electronic Applications - Trifon M. Liakopoulos
A 3D MEMS In-Chip Solenoid Inductor of High Inductance Density for Future Power-MEMS Device | Semantic Scholar
CMOS voltage-controlled oscillator with high-performance MEMS tunable inductor | Micro and Nano Systems Letters | Full Text
Micromachines | Free Full-Text | Mechanical Response of MEMS Inductor with Auxiliary Pillar under High-g Shock
A MEMS Tunable Inductor chip | Download Scientific Diagram
Fabrication of 3D air-core MEMS inductors for very-high-frequency power conversions | Microsystems & Nanoengineering
MEMS inductor fabrication and emerging applications in power electronics and neurotechnologies | Microsystems & Nanoengineering
MEMS inductor fabrication and emerging applications in power electronics and neurotechnologies | Microsystems & Nanoengineering