Tech Brief: A Look at Atomic Layer Deposition (ALD) | Lam Research
LSM - Atomic Layer Deposition
Atomic Layer Deposition for Surface Engineering of Solid Oxide Fuel Cell Electrodes | SpringerLink
Atomic layer deposition on 2D transition metal chalcogenides: layer dependent reactivity and seeding with organic ad-layers - Chemical Communications (RSC Publishing)
What is ALD (Atomic Layer Deposition) - CTECHNANO
What is ALD | Atomic Layer Deposition
Atomic Layer Deposition Process Development – 10 steps to successfully develop, optimize and characterize ALD recipes – Atomic Limits
Kurt J. Lesker Company | Challenges for Non-Ideal Atomic Layer Deposition Processes & Systems | Enabling Technology for a Better World